Publications

Recent Advances in Poly-Silicon Crystallization

Brian Klene, David S. Knowles, M. Shane Bowen, Brandon A. Turk

Abstract
We present the most recent experimental results on Thin-beam Directional X'tallization (TDX), a rapid excimer-laser-based crystallization method for creating extremely high-quality large-grained polycrystalline silicon films on glass substrates. We will present experimental data obtained with our prototype Gen 2 tool, and discuss the ability to produce different types of poly-Si material.

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