NEWS RELEASE

TCZ TO PRESENT ON IMID 2007 CONFERENCE

TCZ has been selected to present an invited paper on thin beam excimer laser annealing on the IMID 2007 conference to be held in Daegu, Korea from August 27-31, 2007. Thin beam excimer annealing is investigated as one possible process enabled by the variable concept of thin beam LTPS processing. The structure of the resulting p-Si material is analyzed in terms of grain size distribution, scaling with energy density and overlap, as well as average surface roughness. This process provides similar control and latitude as conventional excimer laser annealing, but reduced average surface roughness and the potential to be scaled to significant productivity levels.